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| {|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 60%;"
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| |-
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| |-
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| |-style="background:Black; text-align:left; color:White"
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| !Process
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| !Equipment
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| !Parameters
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| !Date and initials
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| |-
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| |-
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| |-style="background:WhiteSmoke; color:black"
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| |Resist
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| |Fumehood D-3
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| |AR-P 6200/2 AllResist E-beam resist
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| |2013 (bottle opened)
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| |-
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| |-style="background:WhiteSmoke; color:black"
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| |Spin Coat
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| |Spin Coater LabSpin A-5
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| |1 min @ 6000 rpm, 4000 1/s2, softbake 5 min @ 150 degC, thickness ~143nm
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| |09-04-2014 TIGRE
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| |-
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| |-
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| |-style="background:WhiteSmoke; color:black"
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| |E-beam exposure
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| |JEOL 9500 E-2
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| |2 nA, aperture 5, dose 207-242 muC/cm2, SHOT A,10, No proximity error correction
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| |10-04-2014 TIGRE
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| |-
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| |-
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| |-style="background:WhiteSmoke; color:black"
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| |Develop
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| |Fumehood D-3
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| |SX-AR 600-54/6 60 sec, 60 sec IPA rinse
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| |April/May-2014 TIGRE
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| |-
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| |-
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| |-style="background:WhiteSmoke; color:black"
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| |Sputter Coat
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| |Cressington 208HR, DTU CEN
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| |2-3 nm Pt, sputtering
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| |22-05-2014 TIGRE
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| |-
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| |-
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| |-style="background:WhiteSmoke; color:black"
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| |Characterization
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| |Zeiss SEM Supra 60VP, D-3
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| |2 kV, WD below 4mm, conducting tape close to pattern
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| |06-06-2014, TIGRE
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| |-
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| |}
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