Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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|Resist | |Resist | ||
|Fumehood D-3 | |Fumehood D-3 | ||
|Resist: AR-P 6200/2 diluted 1:1 in anisole (Bottled opened 16-06-2014 TIGRE) | |'''Resist:''' AR-P 6200/2 diluted 1:1 in anisole (Bottled opened 16-06-2014 TIGRE) | ||
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|Spin Coat | |Spin Coat | ||
|Spin Coater LabSpin A-5 | |Spin Coater LabSpin A-5 | ||
|Spin: 1 min @ 6000 rpm, acc: 2000 1/s2, softbake: 1 min @ 150 degC, thickness: ~50nm (27-08-2014 TIGRE) | |'''Spin:''' 1 min @ 6000 rpm, '''acc:''' 2000 1/s2, '''softbake:''' 1 min @ 150 degC, '''thickness:''' ~50nm (27-08-2014 TIGRE) | ||
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