Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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|Fumehood D-3 | |Fumehood D-3 | ||
|SX-AR 600-54/6 60 sec, 30 sec IPA rinse (28-08-2014 TIGRE) | |SX-AR 600-54/6 60 sec, 30 sec IPA rinse (28-08-2014 TIGRE) | ||
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|Cressington 208HR, DTU CEN | |Cressington 208HR, DTU CEN | ||
|3-5 nm Pt, sputtering (29-08-2014 TIGRE) | |3-5 nm Pt, sputtering (29-08-2014 TIGRE) | ||
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|Zeiss SEM Supra 60VP, D-3 | |Zeiss SEM Supra 60VP, D-3 | ||
|3 kV, WD below 4mm, conducting tape close to pattern (29-08-2014 TIGRE) | |3 kV, WD below 4mm, conducting tape close to pattern (29-08-2014 TIGRE) | ||
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