Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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'''The user manual for all HF/BHF baths, APV's and contact information can be found in LabManager''' [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=64 by clicking here] | '''The user manual for all HF/BHF baths, APV's and contact information can be found in LabManager''' [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=64 by clicking here] | ||
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'''Process information:''' <br> | |||
[[/BHF etch rates|BHF etch rates]] | |||