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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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2,257 edits
Line 383: Line 383:
|-
|-
! 240 [muC/cm2]
! 240 [muC/cm2]
| [[File:6_13_30nm_240_shot14.png|250px]]
| [[File:6_13_30nm_240_shot14.png|230px]]
| [[File:6_13_30nm_240_shot14_Lines.png|250px]]
| [[File:6_13_30nm_240_shot14_Lines.png|230px]]
|
|
|
|
Line 391: Line 391:
|-  
|-  
! 270 [muC/cm2]
! 270 [muC/cm2]
| [[File:6_13_30nm_270_shot14.png|250px]]
| [[File:6_13_30nm_270_shot14.png|230px]]
| [[File:6_13_30nm_270_shot14_Lines.png|250px]]
| [[File:6_13_30nm_270_shot14_Lines.png|230px]]
| [[File:6_13_30nm_270_shot14_Holes.png|250px]]
| [[File:6_13_30nm_270_shot14_Holes.png|230px]]
| [[File:6_13_30nm_270_shot14_Pillars.png|250px]]
| [[File:6_13_30nm_270_shot14_Pillars.png|230px]]
| ACHK NOT READY  
| ACHK NOT READY  
|-  
|-  
|-  
|-  
! 300 [muC/cm2]
! 300 [muC/cm2]
| [[File:6_13_30nm_300_shot14.png|250px]]
| [[File:6_13_30nm_300_shot14.png|230px]]
| [[File:6_13_30nm_300_shot14_Lines.png|250px]]
| [[File:6_13_30nm_300_shot14_Lines.png|230px]]
| [[File:6_13_30nm_300_shot14_Holes.png|250px]]
| [[File:6_13_30nm_300_shot14_Holes.png|230px]]
| [[File:6_13_30nm_300_shot14_Pillars.png|250px]]
| [[File:6_13_30nm_300_shot14_Pillars.png|230px]]


| ACHK NOT READY  
| ACHK NOT READY  
Line 417: Line 417:
|-
|-
! 270 [muC/cm2]
! 270 [muC/cm2]
| [[File:6_13_50nm_270_shot14.png|250px]]
| [[File:6_13_50nm_270_shot14.png|230px]]
| [[File:6_13_50nm_270_shot14_Lines.png|250px]]
| [[File:6_13_50nm_270_shot14_Lines.png|230px]]
| [[File:6_13_50nm_270_shot14_Holes.png|250px]]
| [[File:6_13_50nm_270_shot14_Holes.png|230px]]
| [[File:6_13_50nm_270_shot14_Pillars.png|250px]]
| [[File:6_13_50nm_270_shot14_Pillars.png|230px]]
| [[File:6_13_50nm_270_shot14_Holes2.png|250px]]
| [[File:6_13_50nm_270_shot14_Holes2.png|230px]]
! ACHK MANGLER
! ACHK NOT READY
|-  
|-  


|-  
|-  
! 300 [muC/cm2]
! 300 [muC/cm2]
| [[File:6_13_50nm_300_shot14.png|250px]]
| [[File:6_13_50nm_300_shot14.png|230px]]
| [[File:6_13_50nm_300_shot14_Lines.png|250px]]
| [[File:6_13_50nm_300_shot14_Lines.png|230px]]
| [[File:6_13_50nm_300_shot14_Holes.png|250px]]  
| [[File:6_13_50nm_300_shot14_Holes.png|230px]]  
| [[File:6_13_50nm_300_shot14_Pillars.png|250px]]
| [[File:6_13_50nm_300_shot14_Pillars.png|230px]]
| [[File:6_13_50nm_300_shot14_Holes2.png|250px]]
| [[File:6_13_50nm_300_shot14_Holes2.png|230px]]
! ACHK NOT READY  
! ACHK NOT READY  
|-
|-
Line 444: Line 444:
|-  
|-  
! 300 [muC/cm2]
! 300 [muC/cm2]
| [[File:6_13_100nm_300_shot14.png|250px]]
| [[File:6_13_100nm_300_shot14.png|230px]]
| [[File:6_13_100nm_300_shot14_Lines.png|250px]]
| [[File:6_13_100nm_300_shot14_Lines.png|230px]]
| [[File:6_13_100nm_300_shot14_Holes.png|250px]]  
| [[File:6_13_100nm_300_shot14_Holes.png|230px]]  
| [[File:6_13_100nm_300_shot14_Holes2.png|250px]]
| [[File:6_13_100nm_300_shot14_Holes2.png|230px]]
| [[File:6_13_100nm_300_shot14_Pillars.png|250px]]
| [[File:6_13_100nm_300_shot14_Pillars.png|230px]]
| [[File:6_13_100nm_300_shot14_Test.png|250px]]
| [[File:6_13_100nm_300_shot14_Test.png|230px]]
! ACHK NOT READY  
! ACHK NOT READY  
|-
|-
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/CSAR"