Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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R = k<sub>0</sub> [H<sub>2</sub>O]<sup>4</sup> [KOH]<sup>0.25</sup> e<sup>-E<sub>a</sub>/kT</sup>, | R = k<sub>0</sub> [H<sub>2</sub>O]<sup>4</sup> [KOH]<sup>0.25</sup> e<sup>-E<sub>a</sub>/kT</sup>, | ||
where k<sub>0</sub> = 2480 | where k<sub>0</sub> = 2480 µm/hr, E<sub>a</sub> = 0.595 eV | ||