Specific Process Knowledge/Etch/KOH Etch: Difference between revisions

Revision as of 18:57, 28 January 2008 view source 192.38.87.40 (talk) →Etch rates: Empirical formula (Seidl et al) ← Older edit		Revision as of 19:39, 28 January 2008 view source 192.38.87.36 (talk) →Etch rates: Empirical formula (Seidl et al) Newer edit →
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	The folowing empirical formula can be used for concentrations in the range of 10-60 wt%:		The folowing empirical formula can be used for concentrations in the range of 10-60 wt%:

	R = k<sub>0</sub>		R = k<sub>0</sub>[H<sub>2</sub>O]<sup>4</sup>[KOH]<sup>0.25</sup>e<sup>-E<sub>a</sub>/kT</sup>