Specific Process Knowledge/Thermal Process/Furnace Noble: Difference between revisions
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In the Noble Furnaces more dirty samples with metals and some specific polymers are allowed. Different sample holder are available for wafers and smaller samples (placed on a Si carrier wafer). | In the Noble Furnaces more dirty samples with metals and some specific polymers are allowed. Different sample holder are available for wafers and smaller samples (placed on a Si carrier wafer). | ||
The furnace is located in service area Cx1. | The furnace is located in service area Cx1. | ||
Please check the cross contamination information in LabManager before you use the furnace. | Please check the cross contamination information in LabManager before you use the furnace. | ||