Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
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*Dry | *Dry | ||
*Wet: with torch (H<sub>2</sub>+O<sub>2</sub>) | *Wet: with torch (H<sub>2</sub>+O<sub>2</sub>) | ||
*dope with Boron source wafer | |||
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!style="background:silver; color:black" align="center"|Performance | !style="background:silver; color:black" align="center"|Performance | ||