Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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==Dektak 8 stylus profiler== | ==Dektak 8 stylus profiler== | ||
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<!-- give the link to the equipment info page in LabManager: --> | <!-- give the link to the equipment info page in LabManager: --> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=123 Dektak 8 in LabManager] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=123 Dektak 8 in LabManager] | ||
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==Optical Profiler (Sensofar)== | ==Optical Profiler (Sensofar)== | ||
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== Dektak III-V Profiler == | |||
[[image:III-V profiler.JPG|300x300px|right|thumb|The profiler place in the III-V laboratory, cleanroom A-5 (Dektak III-V profiler).]] | |||
The III-V Profiler (Dektak 3ST stylus profiler) is intended for profile measurements on III-V materials. The profiler is located in the III-V laboratory (yellow room). | |||
'''The user manual, technical information and contact information can be found in LabManager:''' | |||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=184 III-V profiler (Dektak) in LabManager] | |||
The computer connected to the Dektak 3ST is pretty old and runs Windows 98 SE. It is not connected to the network but traces can be saved on either USB memory stick or floppy disk. The USB driver is an old universal driver and has been shown to work with small size USB sticks. However it did not work with an 8GB Kingston stick. | |||
===Equipment performance and process related parameters III-V stylus profiler=== | |||
{| border="2" cellspacing="0" cellpadding="10" | |||
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!style="background:silver; color:black" align="left" rowspan="4" valign="top" |Performance | |||
|style="background:LightGrey; color:black"|Vertical Range | |||
|style="background:WhiteSmoke; color:black"| | |||
*65 kÅ, 655 kÅ, 1310 kÅ | |||
|- | |||
|style="background:LightGrey; color:black"|Scan length range | |||
|style="background:WhiteSmoke; color:black"| | |||
*50-50000 µm | |||
|- | |||
|style="background:LightGrey; color:black"|Stylus track force | |||
|style="background:WhiteSmoke; color:black"| | |||
*Recommended: 3-10 mg, depending on the softness of the surface | |||
|- | |||
|style="background:LightGrey; color:black"|Scan speed ranges | |||
|style="background:WhiteSmoke; color:black"| | |||
*High speed: 3s for 50µm to 50000µm | |||
*Medium speed: 12s for 50µm to 10000µm | |||
*Low speed: 50s | |||
|- | |||
!style="background:silver; color:black" align="left" rowspan="1" valign="top" |Materials | |||
|style="background:LightGrey; color:black"|Allowed substrate materials | |||
|style="background:WhiteSmoke; color:black"| | |||
*III-V | |||
* Silicon | |||
|} | |||
==Comparing the profilers== | ==Comparing the profilers== | ||
Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | Take a look at the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | ||