Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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Ellipsometry is an indirect measurement so a model has to be fit to the data in order to obtain the film thickness and optical constants. To learn more about ellipsometry you can take a look at the [http://www.jawoollam.com/tutorial_1.html tutorial] provided by the J. A. Woollam Co. | Ellipsometry is an indirect measurement so a model has to be fit to the data in order to obtain the film thickness and optical constants. To learn more about ellipsometry you can take a look at the [http://www.jawoollam.com/tutorial_1.html tutorial] provided by the J. A. Woollam Co. | ||
Access to use the CompleteEASE software can be found using Remote Desktop connection to: 10.51.40.00 (or DCHP-D0037.win.dtu.dk) | |||
'''The user manuals, quality control procedure and results and contact information can be found in LabManager:''' | '''The user manuals, quality control procedure and results and contact information can be found in LabManager:''' | ||