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Specific Process Knowledge/Etch/KOH Etch: Difference between revisions

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Bureaucrats, danchip, Administrators
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Bureaucrats, danchip, Administrators
143 edits
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|Roughness
|Roughness
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|
1-25 wafers at a time
Typical: 100-600 Å
|
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1-25 wafer at a time
May form hillocks (pyramidal)


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