Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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Thermal SiO<math>_2</math> | Thermal SiO<math>_2</math> | ||
|Stoichiometric Si<math>_3</math>N<math>_4</math> | | | ||
Stoichiometric Si<math>_3</math>N<math>_4</math> | |||
Si-rich Si<math>_3</math>N<math>_4</math> | Si-rich Si<math>_3</math>N<math>_4</math> | ||