Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
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~1.3 µm/min (80 <sup>o</sup>C) | ~1.3 µm/min (80 <sup>o</sup>C) | ||
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~60(??) nm/min | ~60(??) nm/min | ||
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~1.3 µm/min (80 <sup>o</sup>C) | ~1.3 µm/min (80 <sup>o</sup>C) | ||
| | | | ||
~60(??) nm/min | ~60(??) nm/min | ||