Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
| Line 55: | Line 55: | ||
|Etch rate | |Etch rate | ||
| | | | ||
~0. | ~0.4 µm/min (60 <sup>o</sup>C) | ||
~0.7 µm/min (70 <sup>o</sup>C) | |||
~1.3 µm/min (80 <sup>o</sup>C) | |||
) | ) | ||
| | | | ||
| Line 55: | Line 55: | ||
|Etch rate | |Etch rate | ||
| | | | ||
~0. | ~0.4 µm/min (60 <sup>o</sup>C) | ||
~0.7 µm/min (70 <sup>o</sup>C) | |||
~1.3 µm/min (80 <sup>o</sup>C) | |||
) | ) | ||
| | | | ||