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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable" style="width: 90%;"
{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable" style="width: 90%;"
! width="100" | dose [muC/cm2]
! dose [muC/cm2]
! width="250" | 219
! 219
! width="250" | 230
! 230
! width="250" | 242
! 242
! width="250" | ACHK
! ACHK
|-  
|-  
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{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable" style="width: 90%;"
{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable" style="width: 90%;"
! width="100" | dose [muC/cm2]
! dose [muC/cm2]
! width="250" | 207
! 207
! width="250" | 219
! 219
! width="250" | 230
! 230
! width="250" | 242
! 242
! width="250" | 253
! 253
! width="250" | ACHK
! ACHK
|-  
|-  
|
|
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{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable" style="width: 80%;"
{| cellpadding="2" style="border: 1px solid darkgray;" class="wikitable" style="width: 80%;"
! width="100" | dose [muC/cm2]
! dose [muC/cm2]
! width="250" | 242
! 242
! width="250" | 253
! 253
! width="250" | 276
! 276
! width="250" | ACHK
! ACHK
|-  
|-  
|
|
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