Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
| Line 55: | Line 55: | ||
|Etch rate | |Etch rate | ||
| | | | ||
~ | ~0.43 µm/min (60 <sup>o</sup>C | ||
) | |||
| | | | ||
~60(??) nm/min | ~60(??) nm/min | ||
| Line 55: | Line 55: | ||
|Etch rate | |Etch rate | ||
| | | | ||
~ | ~0.43 µm/min (60 <sup>o</sup>C | ||
) | |||
| | | | ||
~60(??) nm/min | ~60(??) nm/min | ||