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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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|-style="background:silver; color:black"
|-style="background:WhiteSmoke; color:black"
!Spin Speed [rpm]
!Spin Speed [rpm]
!Acceleration [1/s2]
!Acceleration [1/s2]
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|-style="background:WhiteSmoke; color:black"
|-style="background:Silver; color:black"
|6000
|6000
|4000
|4000
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