Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
| Line 29: | Line 29: | ||
70 <sup>o</sup>C | 70 <sup>o</sup>C | ||
80 <sup>o</sup>C | 80 <sup>o</sup>C (standard - fast etch) | ||
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| Line 29: | Line 29: | ||
70 <sup>o</sup>C | 70 <sup>o</sup>C | ||
80 <sup>o</sup>C | 80 <sup>o</sup>C (standard - fast etch) | ||
| | | | ||