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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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DCH-Employees-701
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Developing
|Develop
|SX-AR 600-54/6 60 sec, 60 sec IPA rinse
|SX-AR 600-54/6 60 sec, 60 sec IPA rinse
|08-07-2014 TIGRE
|08-07-2014 TIGRE
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|-
|-
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Coated
|Sputter Coat
|3-5 nm Pt, sputtering
|3-5 nm Pt, sputtering
|09-07-2014 TIGRE
|09-07-2014 TIGRE
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