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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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DCH-Employees-701
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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
|Spin Coat
|Spin Coat
|6000 rpm, 4000 1/s2, 60 sec, Softbake 1 min @ 150 degC, thickness ~140nm
|1 min @ 6000 rpm, 4000 1/s2, softbake 1 min @ 150 degC, thickness ~140nm
|-
|-


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