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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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== SEM pictures ==
== SEM pictures ==


=== 140 nm CSAR ===
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The wafers are diced into smaller pieces and sputter coated with Pt at DTU CEN before SEM inspection; please contact [mailto:ramona.mateiu@cen.dtu.dk|Ramona Valentina Mateiu] for further information.


'''50nm'''
'''50nm'''
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