Specific Process Knowledge/Lithography/CSAR: Difference between revisions
| Line 278: | Line 278: | ||
== SEM pictures == | == SEM pictures == | ||
[[File:CSAR50nmoverview. | [[File:CSAR50nmoverview.png]] | ||
=== 50nm === | === 50nm === | ||
| Line 292: | Line 292: | ||
| [[File:CSAR50nmoverview-10%.tif|120px]] | | [[File:CSAR50nmoverview-10%.tif|120px]] | ||
| [[File:CSAR50nmoverview-5%.tif|120px]] | | [[File:CSAR50nmoverview-5%.tif|120px]] | ||
| [[File:CSAR50nmoverview. | | [[File:CSAR50nmoverview.png|120px]] | ||
| [[File:CSAR50nmoverview+5%.tif|120px]] | | [[File:CSAR50nmoverview+5%.tif|120px]] | ||
|- align="center" | |- align="center" | ||
|} | |} | ||