Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
| Line 89: | Line 89: | ||
# It is crucial to have your pattern ready in GDSII format. Check your GDS-file by importing it in e.g. <span class="plainlinks">[http://www.wieweb.com/ns6/index.html CleWin]</span> or L-edit. In order to reach the files from the computers inside the cleanroom it is recommended to either dropbox them or send them per email to yourself. | # It is crucial to have your pattern ready in GDSII format. Check your GDS-file by importing it in e.g. <span class="plainlinks">[http://www.wieweb.com/ns6/index.html CleWin]</span> or L-edit. In order to reach the files from the computers inside the cleanroom it is recommended to either dropbox them or send them per email to yourself. | ||
# Create sdf and jdf-files | # Create sdf and jdf-files: | ||
#*download [http://download.cnet.com/SuperEdi/3000-2352_4-10291091.html SuperEdi], | #*download [http://download.cnet.com/SuperEdi/3000-2352_4-10291091.html SuperEdi], | ||
#*read the sdf and jdf-file manual from technical documents found [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=292 here], | #*read the sdf and jdf-file manual from technical documents found [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=292 here], | ||