Specific Process Knowledge/Doping: Difference between revisions
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== | == Doping your wafer == | ||
This page is about doping your wafer or making a thin film layer doped with boron, phosphor or Germane. | |||
*[[/Deposition of silicon nitride using LPCVD|Process description using method 1]] | *[[/Deposition of silicon nitride using LPCVD|Process description using method 1]] | ||