Specific Process Knowledge/Wafer and sample drying: Difference between revisions

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 |style="background:LightGrey; color:black"|Batch size
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-*<nowiki>#</nowiki> 100 mm wafers
+*1-25 100 mm wafers
 |style="background:WhiteSmoke; color:black"|
-*<nowiki>#</nowiki> 100 mm wafers
+*1-25 100 mm wafers
 |style="background:WhiteSmoke; color:black"|
-*<nowiki>#</nowiki> 100 mm wafers
+*1-25 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
+*1-25 150 mm wafers
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-*<nowiki>#</nowiki> 50 mm wafers
+*? 50 mm wafers
-*<nowiki>#</nowiki> 100 mm wafers
+*1-25 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
+*1-25 150 mm wafers
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 *1 to 5 wafers per run. Sizes: 2”, 4" or 6"