Specific Process Knowledge: Difference between revisions

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2nd Level - Process Topic

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Back-end processing

Characterization

Etch

Imprinting

Lithography

Thermal Process

Thin film deposition

Wafer and sample drying

Wafer Bonding

Wafer Cleaning

Wafer Information

III-V Process

The section below here is under construction

Overview of sample processing

Clean the sample

Drying Samples

Make a layer on the sample or Film Formation
Thermal Oxide growth
Physical Vapour Deposition
	Sputter deposition
	Thermal deposition
	E-beam evaporation
CVD
	LPCVD
	PECVD
Coating
	Spin coating
	Spray coating
Electroplating
Epitaxial growth

Thermal treatment of the sample

Make a mask on the sample
Lithography
Imprinting

Transfer pattern into the sample
Wet etch
Dry etch
Lift-off

Direct structure definition
Imprinting
LASER machining
Lithographic definition
Polymer Injection molding

Bonding samples together

Characterize the sample

Back end of the sample
Chip/die mounting
Wire bonding
Dicing

Overview of sample processing 2

Clean the sample

Drying Samples

Film Formation
Thermal Oxide growth
Thin Film deposition
	Sputter deposition
	Thermal deposition
	E-beam evaporation
CVD
	LPCVD
	PECVD
Coating
	Spin coating
	Spray coating
Electroplating
Epitaxial growth

Thermal treatment of the sample

Make a mask on the sample
Lithography
Imprinting

Transfer pattern into the sample
Wet etch
Dry etch
Lift-off

Direct structure definition
Imprinting
LASER machining
Lithographic definition
Polymer Injection molding

Bonding samples together

Characterize the sample

Back end of the sample
Chip/die mounting
Wire bonding
Dicing

Overview of sample processing 3

Clean your sample

Dry your sample

Create a layer/film on your sample
Entry page in LabAdviser	Techniques	Materials
Thermal Process/Oxidation	Thermal oxidation	Thermal SiO2
Thin film deposition
	Sputter deposition	Si,SiO2,Si3N3,TiO2, metals
	Thermal evaporation	Al, ?
	E-beam evaporation	Metals
	LPCVD	Si3N4, SRN, SiO2, Si (poly and amorph)
	PECVD	Si3N4, SiO2, PBSG
	Electroplating	Ni
Lithography/Coaters
	Spin coating	resists, polymers
	Spray coating	resists, polymers
Epitaxial growth	MOCVD	?

Dope your sample
Entry page in LabAdviser	Techniques	Materials
Thin film deposition/PECVD	PECVD	Deposition of SiO2 or Si3N4 doped with P,B and Ge
Thin film deposition/Furnace LPCVD PolySilicon	LPCVD	Deposition of PolySi doped with B or P
Thermal Process/Dope with Boron	Predeposition and drive-in	Doping Silicon wafers with boron
Thermal Process/Dope with Phosphorus	Predeposition and drive-in	Doping Silicon wafers with phosphorus
Ionimplant		?

File:Thermal treatment of your sample.png Thermal treatment of your sample

Make a mask on your sample
Entry page in LabAdviser	Techniques
Lithography
	Photolithography
	Deep UV lithography
	E-beam lithography
	Imprinting

Transfer mask pattern to your sample
Entry page in LabAdviser	Techniques	Materials
Etch
	Wet etch	Si,Glass,SiO2,Si3N4,Al,Cr,Ti,Au,Pt,InP,InGaAsP,GaAs/AlGaAs
	Dry etch	Any material
Lift-off		?

Define your structure directly to your sample
Imprinting
LASER machining
Lithographic definition
Polymer Injection molding

Bond your samples together	Bond your samples together

Characterize your sample	Characterize your sample

Pack your sample (back-end)	Back end processing of your sample
Chip/die mounting
Wire bonding
Dicing

@@ Line 264: / Line 264: @@
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
-! Create a layer/film on your sample
+! [[image:Create a film on your sample.png|thumb|150px|Create a layer/film on your sample]]
 |-
 !Entry page in LabAdviser
@@ Line 320: / Line 320: @@
 |}
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
-! Dope your sample
+! [[image:Dope your sample.png|thumb|150px|Dope your sample]]
 |-
 |-
@@ Line 351: / Line 351: @@
 {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2"  align="left"
-! Thermal treatment of your sample
+! [[image:Thermal treatment of your sample.png|thumb|150px|Thermal treatment of your sample]]
 |}
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
-! Make a mask on your sample
+! [[image:Make a mask on your sample.png|thumb|150px|Make a mask on your sample]]
 |-
 !Entry page in LabAdviser
@@ Line 376: / Line 376: @@
 |}
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
-! Transfer mask pattern to your sample
+! [[image:Transfer mask pattrn to your sample.png|thumb|150px|Transfer mask pattern to your sample]]
 |-
 !Entry page in LabAdviser
@@ Line 400: / Line 400: @@
 |}
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
-! Define your structure diretly (no mask)
+! [[image:Transfer mask pattrn to your sample.png|thumb|150px|Define your structure directly to your sample]]
 |-
 |Imprinting
@@ Line 412: / Line 412: @@
 |}
 {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2"  align="left"
+! [[image:Bond your samples together.png|thumb|150px|Bond your samples together]]
 ! Bond your samples together
 |}
 {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2"  align="left"
+! [[image:Characterize your sample.png|thumb|150px|Characterize your sample]]
 ! Characterize your sample
 |}
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
+! [[image:Pack your sample (back-end).png|thumb|150px|Pack your sample (back-end)]]
 ! Back end processing of your sample
 |-