Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
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For safety reasons, even fully trained users are only authorized to mount substrates into the e-beam cassettes, but not authorized to load the cassettes into the autoloader. | For safety reasons, even fully trained users are only authorized to mount substrates into the e-beam cassettes, but not authorized to load the cassettes into the autoloader. | ||
There are two daily loading sessions where cassettes will be loaded into the autoloader by DTU Danchip personel: | There are two daily loading sessions where cassettes will be loaded into the autoloader by trained DTU Danchip personel: | ||
*10:00 - 10:30 | *10:00 - 10:30 | ||