Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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|style="background:LightGrey; color:black"|Output power@100%(laser IPG – nanosecond) | |style="background:LightGrey; color:black"|Output power@100%(laser IPG – nanosecond) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Repetition rate : | Repetition rate : 10kHz to 100kHz | ||
* 1064nm : 80W | * 1064nm : 80W | ||