Specific Process Knowledge/Lithography/ZEP520A: Difference between revisions
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1 Disposable pipettes | 1 Disposable pipettes | ||
The disposable pipettes are not cleanroom compatible and must therefore be handled with care inside the cleanroom. Each bag contain 10 pipettes; this bags must be opened inside a fumehood and each pipette must be cleaned with a N<sub>2</sub> gun before use. | The disposable pipettes are not cleanroom compatible and must therefore be handled with care inside the cleanroom. Each bag contain 10 pipettes; this bags must be opened inside a fumehood and each pipette must be cleaned with a N<sub>2</sub> gun before use. | ||
2 Virtual chip mark detection | 2 Virtual chip mark detection | ||
The e-beam writer measures the height of the substrate and adjust the focus accordingly. This requires no actual chip marks on the wafer. See e-beam writer manual. | The e-beam writer measures the height of the substrate and adjust the focus accordingly. This requires no actual chip marks on the wafer. See e-beam writer manual. | ||