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Specific Process Knowledge/Lithography: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,531 edits
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*UV sensitive:
*UV sensitive:
**AZ 5214E, AZ 4562
**AZ 5214E, AZ 4562, AZ MiR 701 (positive)
**AZ MiR 701, AZ nLOF 2020
**AZ 5214E, AZ nLOF 2020, SU-8 (negative)
**SU-8
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*DUV sensitive
*DUV sensitive
**JSR KRF M230Y
**JSR KRF M230Y, JSR KRF M35G (positive)
**JSR KRF M35G
**UVN2300-0.8 (negative)
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*E-beam sensitive
*E-beam sensitive
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