Specific Process Knowledge: Difference between revisions
Jump to navigation
Jump to search
2nd Level - Process Topic
The section below here is under construction
| Line 41: | Line 41: | ||
|} | |} | ||
{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
!Drying Samples [[File:drying.jpg|50px]] | ! Drying Samples [[File:drying.jpg|50px]] | ||
|} | |} | ||
{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
!Make a layer on the sample [[File:Making a layer 1.jpg|40px]] | ! Make a layer on the sample [[File:Making a layer 1.jpg|40px]] | ||
! | ! | ||
|- | |- | ||
| Line 90: | Line 90: | ||
{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
!Thermal treatment of the sample [[File:Thermal treatment 1.jpg|50px]] | ! Thermal treatment of the sample [[File:Thermal treatment 1.jpg|50px]] | ||
|} | |} | ||
{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
!Make a mask on the sample [[File:Making a mask 1.jpg|40px]] | ! Make a mask on the sample [[File:Making a mask 1.jpg|40px]] | ||
|- | |- | ||
|Lithography | |Lithography | ||
| Line 123: | Line 123: | ||
|} | |} | ||
{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
!Bonding samples together | ! Bonding samples together | ||
|} | |} | ||
{| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible" border="1" cellspacing="1" cellpadding="2" align="left" | ||
!Characterize the sample | ! Characterize the sample | ||
|} | |} | ||
{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2" align="left" | ||
Revision as of 16:58, 27 May 2014
Feedback to this page: click here
Choose the process topic you are interested in
The section below here is under construction 
Overview of sample processing
Clean the sample 
|
|---|
Drying Samples 
|
|---|
Make a layer on the sample 
|
|
|---|---|
| Thermal Oxide growth | |
| Thin Film deposition | |
| Sputter deposition | |
| Thermal deposition | |
| E-beam evaporation | |
| CVD | |
| LPCVD | |
| PECVD | |
| Coating | |
| Spin coating | |
| Spray coating | |
| Electroplating | |
| Epitaxial growth |
Thermal treatment of the sample 
|
|---|
Make a mask on the sample 
|
|---|
| Lithography |
| Imprinting |
| Transfer pattern into the sample |
|---|
| Wet etch |
| Dry etch |
| Lift-off |
| Direct structure definition |
|---|
| Imprinting |
| LASER machining |
| Lithographic definition |
| Polymer Injection molding |
| Bonding samples together |
|---|
| Characterize the sample |
|---|
| Back end of the sample |
|---|
| Chip/die mounting |
| Wire bonding |
| Dicing |