Specific Process Knowledge: Difference between revisions

Thermal treatment of the sample

Make a mask on the sample
	Lithography
	Imprinting

Transfer pattern into the sample
Wet etch
Dry etch
Lift-off

Direct structure definition

- Imprinting
- LASER machining
- Lithographic definition
- Polymer Injection molding

Bonding samples together

Characterize the sample

Back end of the sample

@@ Line 106: / Line 106: @@
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
 !Make a mask on the sample
+!
+|-
+|
+|Lithography
+|-
+|
+|Imprinting
+|-
 |}
-**Lithography
-**Imprinting
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
 !Transfer pattern into the sample
+|-
+|Wet etch
+|-
+|Dry etch
+|-
+|Lift-off
+|-
 |}
-**Wet etch
-**Dry etch
-**Lift-off
 {| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
 !Direct structure definition