Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/fluence: Difference between revisions

Revision as of 15:21, 26 May 2014

Fluence definition

The fluence produces by a laser is, by definition, the energy delivered by a laser pulse ( $E_{p u l s e}$ ) per surface unit ( $A$ ) and it is given in J/cm2.

The function $E_{p u l s e}$ is defined as :

E_{p u l s e} = \frac{\overline{P}}{f}

Where $\overline{P}$ (average power) is measured with the laser sensor power measurement (see manual,section 5.3) and the repetion rate ( $f$ ) is set in the parameter file under " laser frequency".

The fluence is therefore determinated as such :

F l u e n c e = \frac{E_{p u l s e}}{A}

The area ( $A$ ) can determinate with the theoretical min spot diameter (1/e2), available here

Fluence results measurement

Fluence result for IR wavelength (1064nm, F255mm)	Fluence result for green wavelength (532nm, F255mm)	Fluence result for UV wavelength (355nm, F255mm)

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	== Fluence definition ==		== Fluence definition ==

	The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>S</math>) and it is given in J/cm2.		The fluence produces by a laser is, by definition, the energy delivered by a laser pulse (<math>E_{pulse}</math>) per surface unit (<math>A</math>) and it is given in J/cm2.