Specific Process Knowledge/Characterization/Stress measurement: Difference between revisions
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#Measure the thickness of the thin film (ex. using the FilmTek or the Ellipsometer is possible). | #Measure the thickness of the thin film (ex. using the FilmTek or the Ellipsometer is possible). | ||
#Use the program for stress measurement in the profilometer software on the profilometer you used for the measurements. Use both the pre-stress measurement and the post-stress measurement. | #Use the program for stress measurement in the profilometer software on the profilometer you used for the measurements. Use both the pre-stress measurement and the post-stress measurement. | ||
#*The dektak program asks for substrate elasticity (choose the substrate type for example Si(111)), substrate thickness, film thickness and the name of the pre-stress measurement. | |||