Specific Process Knowledge/Lithography/ZEP520A: Difference between revisions
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!colspan="7"|ZEON ZEP520A1:1 in anisole spinning on Spin Coater: Manual LabSpin A-5, TIGRE, 21-05-2014. Resist was mixed 15-05-2014, i.e. approximatley 6 days old. | |||
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|-style="background:silver; color:black" style="text-align:left;" | |||
!Spin Speed [rpm] | |||
!Acceleration [1/s2] | |||
!Thickness [nm] | |||
!St Dev | |||
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|-style="background:WhiteSmoke; color:black" | |||
|2000 | |||
|4000 | |||
|141.03 | |||
|1.02 | |||
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|-style="background:WhiteSmoke; color:black" | |||
|3000 | |||
|4000 | |||
|115.96 | |||
|0.98 | |||
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|-style="background:WhiteSmoke; color:black" | |||
|4000 | |||
|4000 | |||
|100.56 | |||
|0.80 | |||
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|-style="background:WhiteSmoke; color:black" | |||
|5000 | |||
|4000 | |||
|91.01 | |||
|0.38 | |||
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|-style="background:WhiteSmoke; color:black" | |||
|6000 | |||
|4000 | |||
|84.85 | |||
|0.37 | |||
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|} | |} | ||