Specific Process Knowledge/Etch/Wet III-V Etches: Difference between revisions
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The etchrates have not yet been calibrated at DTU Danchip. | The etchrates have not yet been calibrated at DTU Danchip. | ||
The temperature is 22 degC +/- 1 degC. | The temperature is 22 degC +/- 1 degC. | ||
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==Concentrated H2SO4== | ==Concentrated H2SO4== | ||