Specific Process Knowledge/Characterization/Element analysis: Difference between revisions

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 !Secondary Ion Mass Spectroscopy
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+|Technique
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+|Non destructive excitation of X-rays in the sample. The elemental analysis is possible because the energy of these photons is characteristic of the element they emitted from.
+|Destructive method that sputters off surface atoms with heavy ions.
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+|Spatial resolution
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+|Very precise point-like analysis is possible with SEM electron beam.
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+|Limited to what is visible in a camera
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+|Depth resolution
+|The size interaction volume depends on the SEM high voltage and sample density:
+* The higher the SEM high voltage the bigger and deeper the interaction volume
+* The more dense the material is the smaller is the interaction volume
+|-
+|Sensitivity
+|Approximately 1 % atomic
+|1 ppb
 |}