Specific Process Knowledge/Characterization/Thickness Measurer: Difference between revisions
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It measures with an accurracy within a few µm. | It measures with an accurracy within a few µm. | ||
The | The range is from a few µm up to 5mm | ||
Measure the wafer in the box next to the meter.If ok other wafers can be measured. | Measure the wafer in the box next to the meter.If this is ok, then other wafers can be measured. | ||
There is a calibration device by the DEKTAK. | There is a calibration device by the DEKTAK. | ||
It is calibrated at 750µm | It is calibrated at 750µm | ||