Specific Process Knowledge/Lithography/Strip: Difference between revisions
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A typical process time for stripping of 1.5 µm AZ5214e resist is 15-25 min and for stripping of 9.5 µm AZ4562 resist is 20-35 min with the process parameters: 210ml O<math>_2</math>/min or mixture of 210ml O<math>_2</math>/min and 70ml N<math>_2</math>/min, power 1000W. | A typical process time for stripping of 1.5 µm AZ5214e resist is 15-25 min and for stripping of 9.5 µm AZ4562 resist is 20-35 min with the process parameters: 210ml O<math>_2</math>/min or mixture of 210ml O<math>_2</math>/min and 70ml N<math>_2</math>/min, power 1000W. | ||
A Descum process in manuel mode: O2: 70sccm, N2: 70sccm, power: 150W, time: 10min. Be sure to wait for cooling if the machine has been used at 1000W right before. | |||
At a load at 2 Fused silica wafers resist removed 0.01-01,5um | |||
==Plasma Asher 1== | ==Plasma Asher 1== | ||