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Specific Process Knowledge/Lithography/Strip: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,528 edits
Line 147: Line 147:
|-  
|-  
|'''Process pressure'''
|'''Process pressure'''
|0.8- 1.0mbar
|0.8- 1.2mbar
|
|0.5- 1.0mbar
|0.5- 1.0mbar  
|0.5- 1.0mbar  
|0.8-1.5mbar
|0.8-1.5mbar
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