Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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<!-- give the link to the equipment info page in LabManager: --> | <!-- give the link to the equipment info page in LabManager: --> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=17 PECVD2 in LabManager] </ | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=17 PECVD2 in LabManager] <br/> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=326 PECVD3 in LabManager] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=326 PECVD3 in LabManager] | ||