Specific Process Knowledge/Thin film deposition/PECVD: Difference between revisions
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All though PECVD2 and 3 are very similar you should not expect to transfer a recipe between the systems and get the exact same result. | All though PECVD2 and 3 are very similar you should not expect to transfer a recipe between the systems and get the exact same result. | ||
'''The user manuals, quality control procedures and results, user APVs, technical information and contact information can be found in LabManager:''' | |||
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=17 PECVD2 in LabManager] | |||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=326 PECVD2 in LabManager] | |||
== Process information on PECVD2, PECVD3 (and PECVD1:<span style="color:Red">Expired!</span>)== | == Process information on PECVD2, PECVD3 (and PECVD1:<span style="color:Red">Expired!</span>)== | ||