LabAdviser

LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities. The function and capacity of each piece of equipment is described in detail and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to log in with your DTU login. LabAdviser is only editable for Danchip employees. If you need further information about certain machinery or processes, please contact the Danchip personnel. Any feedback you might have on LabAdviser is welcome and can be given by mail to the LabAdviser mailbox: labadviser@danchip.dtu.dk

News in LabAdviser:
The latest monthly LabAdviser update: LabAdviser update send out 2014-04-11
Slides from the customer meeting December 2013: Customer meeting 2013

Contents

• Danchip contact information
• Introduction to LabAdviser and Processing
• Process flow approval
• Specific Process Knowledge
  • Back-end processing
  • Characterization
  • Etch
  • Imprinting
  • Lithography
  • Thermal process
  • Thin film deposition
  • Wafer and sample drying
  • Wafer Bonding
  • Wafer cleaning
  • Wafer/Substrate Information
  • III-V Processes
• Equipment List
• New equipment in the pipeline and old equipment for decommissioning
• Surveys, statistics, monthly LabAdviser updates and other info.
• How to add information to LabAdviser

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Cleanroom naming

(not fully implemented yet!)