Specific Process Knowledge: Difference between revisions

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*Clean the sample
*Clean the sample
*Drying Samples
*Drying Samples
*Make a layer on the sample
 
**Thermal Oxide growth
{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
{| class="wikitable collapsible collapsed" border="1" cellspacing="1" cellpadding="2"  align="left"
! Col1_head
 
! gkraetj
!Make a layer on the sample
!
!
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|Thermal Oxide growth
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|Col1_row
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|nvkwo
|Thin Film deposition
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|Sputter deposition
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|Thermal deposition
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|E-beam evaporation
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|CVD
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|LPCVD
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|PECVD
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|Coating
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|Spin coating
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|Spray coating
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|Electroplating
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|Epitaxial growth
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|askldjg
|asldtkhj
|}
|}


**Thin Film deposition
***PVD
****Sputter deposition
****Thermal deposition
****E-beam evaporation
***CVD
****LPCVD
****PECVD
***Coating
****Spin coating
****Spray coating
****Electroplating
**Epitaxial growth
*Thermal treatment of the sample
*Thermal treatment of the sample
*Make a mask on the sample
*Make a mask on the sample

Revision as of 12:01, 27 May 2014

2nd Level - Process Topic

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Sample processing:

  • Clean the sample
  • Drying Samples
  • Thermal treatment of the sample
  • Make a mask on the sample
    • Lithography
    • Imprinting
  • Transfer pattern into the sample
    • Wet etch
    • Dry etch
    • Lift-off
  • Direct structure definition
    • Imprinting
    • LASER machining
    • Lithographic definition
    • Polymer Injection molding
  • Bonding samples together
  • Characterize the sample
  • Back end of the sample
    • Chip/die mounting
    • Wire bonding
    • Dicing