Specific Process Knowledge/Characterization/Element analysis: Difference between revisions
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== Secondary Ion Mass Spectrometry == | == Secondary Ion Mass Spectrometry == | ||
[[image:SIMScascade.gif|200x200px|right|thumb|Atoms that used to make up the surface are sputtered off by the high energy ions | [[image:SIMScascade.gif|200x200px|right|thumb|Atoms that used to make up the surface are sputtered off by the high energy ions; some are emitted as secondary ions. ]] | ||
When a solid sample is sputtered by primary ions of few keV energy, a fraction of the particles emitted from the target is ionized. Secondary Ion Mass Spectrometry consists of analyzing these secondary ions with a mass spectrometer. Secondary ion emission by a solid surface under ion bombardment supplies information about the elemental, isotopic and molecular composition of its uppermost atomic layers. | When a solid sample is sputtered by primary ions of few keV energy, a fraction of the particles emitted from the target is ionized. Secondary Ion Mass Spectrometry consists of analyzing these secondary ions with a mass spectrometer. Secondary ion emission by a solid surface under ion bombardment supplies information about the elemental, isotopic and molecular composition of its uppermost atomic layers. | ||