Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
Appearance
| Line 87: | Line 87: | ||
* Red (165x165mm) | * Red (165x165mm) | ||
|- | |- | ||
|style="background:LightGrey; color:black" |[[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Output power @100%(laser TB width – picosecond)]] | |style="background:LightGrey; color:black" |[[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/OutputPower |Output power @100%(laser TB width – picosecond)]] | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
| Line 143: | Line 143: | ||
| 2000mm/s | | 2000mm/s | ||
|- | |- | ||
| Fluence | | [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/OutputPower |Fluence]] | ||
| 0,01J/cm2 | | 0,01J/cm2 | ||
| 113J/cm2 | | 113J/cm2 | ||
| Line 151: | Line 151: | ||
| 74µm | | 74µm | ||
|- | |- | ||
|Pulse energy | |[[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool/OutputPower |Pulse energy]] | ||
| 0,03µJ | | 0,03µJ | ||
| 800 µJ | | 800 µJ | ||