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Specific Process Knowledge/Lithography/CSAR: Difference between revisions

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!Equipment
!Equipment
!Process Parameters
!Process Parameters
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!colspan="3"|Spin Coat of AllResist AR-P 6200-2, TIGRE, 09-04-2014
!colspan="3"|Spin Coat of AllResist AR-P 6200-2, TIGRE, 09-04-2014
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!colspan="3"|Characterization, TIGRE, 09-04-2014
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|Ellipsometer VASE B-1
|ZEP program used; measured at 70 deg only
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!colspan="3"|E-beam Exposure, TIGRE, 10-04-2014
!colspan="3"|E-beam Exposure, TIGRE, 10-04-2014
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!colspan="3"|Development, TIGRE, 10-04-2014
!colspan="3"|Development, TIGRE, 10-04-2014
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!colspan="3"|Characterization, TIGRE, ??-04-2014
!colspan="3"|Characterization, TIGRE, ??-04-2014
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