Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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!Spin Coater | !Spin Coater | ||
!Process Parameters | !Process Parameters | ||
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|Spin Coater Manual, LabSpin, A-5 | |Spin Coater Manual, LabSpin, A-5 | ||
|60 sec at various spin speed. Acceleration 4000 s-2, softbake 5 min at 150 deg Celcius | |60 sec at various spin speed. Acceleration 4000 s-2, softbake 5 min at 150 deg Celcius | ||
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{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" | {|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" | ||