Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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!TIGRE | |||
|2014-04-09 | |||
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|-style="background:silver; color:black" | |||
!Spin Speed [rpm] | |||
!Acceleration [1/s2] | |||
!Spin Time [s] | |||
!Thickness [nm] | |||
!St Dev | |||
!Uniformity (+/-) | |||
!Comments | |||
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|-style="background:WhiteSmoke; color:black" | |||
|2000 | |||
|4000 | |||
|60 | |||
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Revision as of 14:34, 9 April 2014
CSAR
| TIGRE | 2014-04-09 | |||||
|---|---|---|---|---|---|---|
| Spin Speed [rpm] | Acceleration [1/s2] | Spin Time [s] | Thickness [nm] | St Dev | Uniformity (+/-) | Comments |
| 2000 | 4000 | 60 |